Surface analysis in nm resolution: OptiQuiver
The OptiQuiver is a very universal optical measuring instrument and works with practically all types of optical radiation. The sources can be narrowband and highly coherent, such as lasers, but also broadband such as LEDs or white light sources. Furthermore, the radiation can be divergent, collimated or focused. An internal broadband light source is also available. The system determines the absolute phase shift with spatial resolution, which enables a high dynamic range and has a measuring rate of approx. 2 Hz.
The OptiQuiver can therefore characterize surfaces and optics, measure beam profiles, AOIs and divergence angles, track wandering focal points, etc. In the basic version an aperture of 48 mm is currently available.
Applications
- Monitoring and control of adaptive optics (mirrors and lenses)
- Measurement of shape (PV) and surface roughness of planar and non-planar mirrors
- Measuring the shape and imaging quality of optical lenses
- Measurement of the concentricity of bearings (wobble measurement)
- Automated beam alignment in X and Y axis
- Checking and adjusting the optical path in optical test setups
- High-resolution optical wavefront measurement
- Measurement of the homogeneity of the irradiation on a surface
- Measurement of the deformation of semiconductor wafers
- Measurement of the beam shape and beam quality of lasers, LEDs and white light sources
- Qualification of prescription lenses and contact lenses
Features
- Quartus Engineering as an experienced house for customized application software provides an outstanding user interface. (compatible with Windows and MacOS)
- 2D and 3D wavefront diagrams with high dynamic range, Zernike decomposition, residual error, angle tilt and beam profile
- The removable reference mirror in the kinematic lens cap enables a self-test (audit mode) for function control at any time
- Large input aperture for measuring beams and reflective surfaces, without additional beam condenser/expander
- Interactive plotting tools with live point tracking and user-selectable color scales
- Control functions for the internal light source
- Input function for all operation parameters (gain, wavelength, etc.)
- Long-term function for virtually all functions
- Recording function of live measurements for later offline analysis
- Temperature compensation for mobile use
- Compact size and storage in a carry-on case for remote inspection and easy transportation
- APIs for OEM integration (gRPC via Python, C++, Matlab)
Standard specifications and configurations
| Model | ||||
|---|---|---|---|---|
| QOQ-025-0550-075 | QOQ-048-0550-075 | QOQ-100-0550-075 | Units | |
| Optical Specs | ||||
| Aperture diameter | 25 | 48 | 100 | mm |
| Integrated light source | LED, RG1 (Low risk group) per IEC-62471:2006 | |||
| Internal beam wavelength | 550 | nm | ||
| Mask pitch | 350 | 500 | 500 | µm |
| Mask aperture diameter | 200 | 250 | 250 | µm |
| Mask EFL | 75 | 75 | 75 | mm |
| Active mask apertures | 6568 | 7668 | 7668 | |
| Minimum beam diameter | 3 | 3 | 5 | mm |
| Sensor Specs | ||||
| Detector range | 400 - 750 | 400 - 750 | 400 - 750 | nm |
| Resolution | 4024 x 3036 | 5472 x 3648 | 5472 x 3648 | pix |
| Pixel pitch | 1.85 | 2.4 | 2.4 | µm |
| Bit depth | 8 Bit | 8 Bit | 8 Bit | |
| Measurement Specs | ||||
| Max tilt | > 4 | > 6 | > 8 | deg |
| Tilt accuracy | < 0.5 | < 1 | < 1 | arcsec |
| Tilt resolution | < 0.25 | < 0.5 | < 0.5 | arcsec |
| Wavefront accuracy (RMS) | 25 | 30 | 50 | nm |
| Wavefront sensitivity (RMS) | 10 | 15 | 25 | nm |
| Wavefront dynamic range | > 1 | > 1.5 | > 2 | mm |
| General Specs | ||||
| USB interface | USB 3.0 type A | |||
| Frame rate | 4 - 20 | 2 - 10 | 2 - 10 | Hz |
| Power supply | 24 V, 1.5 A max | |||
| Overvoltage category | OVII | |||
| Pollution degree | PD1 | |||
| Operating temperature | 10 to 30° | C | ||
| Operating humidity | 10 to 85%, None condensing | RH | ||
| Storage temperature | -10 to 50° | C | ||